Center of Nanoelectronics and Novel Materials & Laboratory of Nanophotonics

Publication details
Name:	Influence of oxygen on radiation-stimulated diffusion of phosphorus in silicon
Journal:	Sov. Phys. Semicond
Detail info:	15(1), 1 – 3
Year:	1981
Authors:	V. E. Borisenko, V. A. Labunov, L. D. Buiko, V. A. Ukhov.