Center of Nanoelectronics and Novel Materials & Laboratory of Nanophotonics

Publication details
Name:	Annealing of antimony implanted silicon with a halogen lamp irradiation
Journal:	Phys. Stat. Sol. (a)
Detail info:	72(2), K173 - K176
Year:	1982
Authors:	V. E. Borisenko, V. A. Labunov.