Center of Nanoelectronics and Novel Materials & Laboratory of Nanophotonics

Publication details
Name:	Effect of Oxygen Ion Implantation on the Properties of Al and Si
Journal:	Inorganic Materials
Detail info:	V.34, No.8.- P.783-786.
Year:	1998
Authors:	A. L. Danilyuk, V.V. Uglov, N.N. Cherenda.