Center of Nanoelectronics and Novel Materials & Laboratory of Nanophotonics

Publication details
Name:	Doping of silicon with arsenic and phosphorus from spin-on sources exposed to incoherent light
Journal:	J. Phys
Detail info:	44(10), C5/427 - C5/431
Year:	1983
Authors:	V. E. Borisenko, A. Nylandsted Larsen, L. D. Nielsen.