Publication details |
Name: |
Structure modification in As-ion implanted silicon layers during pulse thermal treatment |
Journal: |
Rad. Eff. Lett |
Detail info: |
87(3), 109 – 115 |
Year: |
1985 |
Authors: |
V. E. Borisenko, V. V. Gribkovskii, F. F. Komarov, V. S. Solov'yev, P. I. Gaiduk. |
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