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Publications > Structure modification in As-ion implant...
Publication details
Name: Structure modification in As-ion implanted silicon layers during pulse thermal treatment
Journal: Rad. Eff. Lett
Detail info: 87(3), 109 115
Year: 1985
Authors: V. E. Borisenko, V. V. Gribkovskii, F. F. Komarov, V. S. Solov'yev, P. I. Gaiduk.
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