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RBS study of transient thermal and anodi...
Publication details
Name:
RBS study of transient thermal and anodic oxidation of tantalum films
Journal:
Phys. Stat. Sol. (a)
Detail info:
93(1), 123 – 130
Year:
1986
Authors:
V. E. Borisenko
,
V. Parkhutik
.
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